- #1
RogelioAguirre
- 3
- 0
Hi Guys,
It Is me again, I am working in the design of a packaging for a MEMS sensor, the package is a oil-based diaphragm, who is basically a chamber that in the bottom has a pressure sensor, the sensor is in the chamber of oil completelly cover by oil, in the other extreme of the chamber there is one membrane (very thin) that is in contact with a uniform pressure. The membrane is design in a way that will not absorb energy and will let pass the pressure from the exterior to the oil inside the chamber (I am attaching a schematic). Here is where I need your help. Which will be the equation to define the transfer of the external pressure to the sensor through the oil considering the properties of the oil (viscosity, etc) and in a worst case a compressibility of 2%. The chamber is closed, there is not interchange of mass. My background is MEMS design, but I need to know how to describe the packaging too.
I really need your help
It Is me again, I am working in the design of a packaging for a MEMS sensor, the package is a oil-based diaphragm, who is basically a chamber that in the bottom has a pressure sensor, the sensor is in the chamber of oil completelly cover by oil, in the other extreme of the chamber there is one membrane (very thin) that is in contact with a uniform pressure. The membrane is design in a way that will not absorb energy and will let pass the pressure from the exterior to the oil inside the chamber (I am attaching a schematic). Here is where I need your help. Which will be the equation to define the transfer of the external pressure to the sensor through the oil considering the properties of the oil (viscosity, etc) and in a worst case a compressibility of 2%. The chamber is closed, there is not interchange of mass. My background is MEMS design, but I need to know how to describe the packaging too.
I really need your help