Can You Etch Al2O3 Without Etching Al in Microelectronics?

Thread starter Excom
Start date May 29, 2014
Tags

Etching

In summary, the conversation discussed the differences between etching Al2O3 and etching Al, with the main difference being their chemical composition. It was noted that etching Al2O3 is important for creating precise patterns on the surface, while etching Al is not necessary due to its softness. The most commonly used etching solutions for Al2O3 were also mentioned, as well as techniques for selectively etching Al2O3 without damaging Al. It was concluded that etching Al2

May 29, 2014

Excom

Hi

I have a small challenge. I need to etch aluminium oxide but not aluminum. Does anyone know if this is possible? If yes how?

It is for some microelectronic devices. Hence I can afford etching the aluminum.

Chemistry news on Phys.org

May 30, 2014

hilbert2

Science Advisor

Insights Author

Gold Member

I think some kind of chelating agent such as EDTA might dissolve aluminum oxide but not aluminum.

Related to Can You Etch Al2O3 Without Etching Al in Microelectronics?

1. How is etching Al₂O₃ different from etching Al?

The main difference between etching Al₂O₃ and etching Al is the chemical composition of the two materials. Al₂O₃ is an oxide of aluminum, while Al is a pure metal. This means that different etching solutions and techniques are needed to etch each material.

2. Why is it important to etch Al₂O₃ but not Al?

Etching Al₂O₃ is important because it allows for precise and controlled removal of the material, which is necessary for creating patterns and structures on the surface. On the other hand, etching Al is not necessary as it is a relatively soft metal and can be easily machined with other methods.

3. What etching solutions are commonly used for Al₂O₃?

The most common etching solutions for Al₂O₃ include hydrofluoric acid (HF) and phosphoric acid (H₃PO₄). These acids are able to dissolve the oxide layer on the surface of Al₂O₃ without damaging the underlying material.

4. How can etching Al₂O₃ but not Al be achieved?

Etching Al₂O₃ but not Al can be achieved by selectively protecting the aluminum surface with a material that is resistant to the etching solution. This can be done through masking techniques, such as using photoresist or wax, or by depositing a protective layer of a material like silicon dioxide (SiO₂) on the aluminum surface.

5. Can etching Al₂O₃ be used for precise patterning?

Yes, etching Al₂O₃ can be used for precise patterning. With the right etching solutions and techniques, it is possible to etch patterns as small as a few nanometers on the surface of Al₂O₃. This makes it a valuable technique for microfabrication and nanotechnology applications.