Atomic Structure of Wet Oxidized Silicon

In summary, wet oxidation is a process used to create a silicon oxide layer on the surface of silicon by exposing it to water vapor and oxygen at high temperatures. This is a cost-effective method for producing high-quality oxide layers, which are important for electronic and semiconductor applications. Wet oxidation alters the atomic structure of silicon by replacing some silicon atoms with oxygen atoms in the lattice. Understanding this atomic structure is crucial for optimizing the properties of the oxide layer and controlling impurity diffusion. Techniques like X-ray diffraction and transmission electron microscopy can be used to analyze the atomic structure of wet oxidized silicon.
  • #1
sezhesta
1
0
Hello everyone,

I would like to buy some Si wafer with SiO2 layer on it. The manufacturer told me that they obtain the SiO2 with a wet oxidation process.

My question is, would this layer be amorphous or crystalline or polycrystalline?

Thanks!
 
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  • #2
You'll have to ask the manufacturer.
 
  • #3
The wet oxide layer is amorphous (glassy) like fused silica. Consist of regular silicon-oxide tetrahedrons, mostly making 6-member rings, like in cristobalite, but without long-range order.

ehild
 
  • #4
Welcome to PF BTW.
 

Related to Atomic Structure of Wet Oxidized Silicon

1. What is wet oxidation?

Wet oxidation is a process in which silicon is exposed to water vapor and oxygen at high temperatures, resulting in the formation of a silicon oxide layer on the surface of the silicon.

2. Why is wet oxidation used to create silicon oxide layers?

Wet oxidation is used because it is a relatively simple and cost-effective process for creating high-quality oxide layers on silicon, which are essential for many electronic and semiconductor applications.

3. How does wet oxidation affect the atomic structure of silicon?

During wet oxidation, the oxygen atoms diffuse into the silicon lattice and bond with the silicon atoms, forming a layer of silicon oxide. This changes the atomic structure of the silicon, as the oxygen atoms take the place of some of the silicon atoms in the lattice.

4. What is the importance of understanding the atomic structure of wet oxidized silicon?

Understanding the atomic structure of wet oxidized silicon is crucial for optimizing the properties of the oxide layer, as well as for controlling the diffusion of impurities into the silicon. This knowledge is also essential for developing new and improved wet oxidation processes.

5. How can the atomic structure of wet oxidized silicon be analyzed?

The atomic structure of wet oxidized silicon can be analyzed using techniques such as X-ray diffraction and transmission electron microscopy, which can provide information about the crystal structure and composition of the oxide layer.

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